NEXLINE® piezomotors, also known as inchworm motors, are based on very stable and powerful shear and clamping actuators. The PiezoWalk® stepping drive used is based exclusively on static friction contacts of several piezo actuators on a rod. For feed forward, the actuators are lifted physically from the rod, generating no wear and no particles. PiezoWalk® drives have high resolution of less than one nanometer typical of piezo drives.
NEXLINE® piezomotors have particularly high forces and stiffnesses. They firmly hold the target position and are capable of dynamically compensating oscillations in the range of a few micrometers with nanometer resolution. Moreover, they are suitable for stages and actuators in a vacuum down to 10-9 hPa and can be used for 6-axis Hexapod systems.